Surface-hardening effect of B implantation in 6H-SiC...

Surface-hardening effect of B implantation in 6H-SiC ceramics

Heng Du, Zheng-cao Li, Tian Ma, Wei Miao, Zheng-jun Zhang
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Volume:
3
Language:
english
Pages:
4
DOI:
10.1007/s11706-009-0041-0
Date:
September, 2009
File:
PDF, 229 KB
english, 2009
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