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Steering of surface discharges on Through-Glass-Vias (TGVs) combined with high-density nonequilibrium atmospheric pressure plasma generation
Sato, Yoichiro, Katsuno, Kaede, Odaka, Hidefumi, Imajyo, Nobuhiko, Ishikawa, Kenji, Hori, MasaruJournal:
Journal of Physics D: Applied Physics
DOI:
10.1088/1361-6463/aba1ad
Date:
July, 2020
File:
PDF, 1.46 MB
2020