Electrical and microstructural properties of Ta-C thin films for metal gate
Aihaiti, Litipu, Tuokedaerhan, Kamale, Sadeh, Beysen, Zhang, Min, Xiang Qian, Shen, Mijiti, AbuduwailiVolume:
7
Journal:
Materials Research Express
DOI:
10.1088/2053-1591/aba0e9
Date:
July, 2020
File:
PDF, 2.88 MB
2020