Photoinduced deformation of a-C thin films prepared by RF...

Photoinduced deformation of a-C thin films prepared by RF magnetron sputtering

Aono, Masami, Miyazaki, Hisashi, Kitazawa, Nobuaki, Sato, Yohei, Terauchi, Masami
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Volume:
108
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2020.107844
Date:
October, 2020
File:
PDF, 2.69 MB
2020
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