Deposition and patterning of electrodes on the vertical...

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Journal of Micromechanics and Microengineering 2020 / 07

Deposition and patterning of electrodes on the vertical sidewalls of deep trenches

BONNIN, Lucas, PIOT, Adrien, ISAC, Nathalie, BOSSEBOEUF, Alain
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Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aba377
Date:
July, 2020
File:
PDF, 2.14 MB
2020
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