Self‐ion irradiation on hydrogenated amorphous carbon...

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Surface and Interface Analysis 2020 / 04

Self‐ion irradiation on hydrogenated amorphous carbon films at depth of adhesion interlayer: Radiation‐induced atomic intermixing and degraded film properties

Xu, Jiao, Qiao, Li, Duan, Zewen, Guo, Dengji, Chai, Liqiang, Zhao, Xiaoyu, Wang, Peng, Liu, Weimin
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Journal:
Surface and Interface Analysis
DOI:
10.1002/sia.6785
Date:
April, 2020
File:
PDF, 26.16 MB
2020
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