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Abrasive mechanisms and interfacial mechanics of amorphous silicon carbide thin films in chemical-mechanical planarization
Nguyen, Van-Thuc, Fang, Te-HuaJournal:
Journal of Alloys and Compounds
DOI:
10.1016/j.jallcom.2020.156100
Date:
July, 2020
File:
PDF, 4.83 MB
2020