Si/SiGe PMOSFET using P+implantation technology

Journal of Electronics (China) 2007 / 01 Vol. 24; Iss. 1

Si/SiGe PMOSFET using P+implantation technology

Jing Tan, Jingchun Li, Wanjing Xu, Jing Zhang, Kaizhou Tan, Mohua Yang
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Volume:
24
Language:
english
Pages:
4
DOI:
10.1007/s11767-005-0129-3
Date:
January, 2007
File:
PDF, 193 KB
english, 2007
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