Precursor-surface interactions revealed during...

Scientific Reports 2020 / 12 Vol. 10; Iss. 1

Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry

Kilic, Ufuk, Mock, Alyssa, Sekora, Derek, Gilbert, Simeon, Valloppilly, Shah, Ianno, Natale, Langell, Marjorie, Schubert, Eva, Schubert, Mathias
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Volume:
10
Journal:
Scientific Reports
DOI:
10.1038/s41598-020-66409-8
Date:
December, 2020
File:
PDF, 2.29 MB
2020
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