Efficient NH3-based process to remove chlorine from electron beam deposited ruthenium produced from (η3-C3H5)Ru(CO)3Cl
Rohdenburg, Markus, Boeckers, Hannah, Brewer, Christopher R., McElwee-White, Lisa, Swiderek, PetraVolume:
10
Journal:
Scientific Reports
DOI:
10.1038/s41598-020-67803-y
Date:
December, 2020
File:
PDF, 1.29 MB
2020