Effective silicon production from SiCl 4...

Science and Technology of Advanced Materials 2020 / 06

Effective silicon production from SiCl 4 source using hydrogen radicals generated and transported at atmospheric pressure

Okamoto, Yuji, Sumiya, Masatomo, Nakamura, Yuya, Suzuki, Yoshikazu
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Journal:
Science and Technology of Advanced Materials
DOI:
10.1080/14686996.2020.1789438
Date:
June, 2020
File:
PDF, 2.80 MB
2020
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