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Modeling of photolithography process in semiconductor wafer fabrication systems using extended hybrid Petri nets
Bing-hai Zhou, Qing-zhi Pan, Shi-jin Wang, Bin WuVolume:
14
Language:
english
Pages:
6
DOI:
10.1007/s11771-007-0077-1
Date:
June, 2007
File:
PDF, 388 KB
english, 2007