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Microstructure of Stacking Fault Complex/Carrot Defects at Interface Between 4H-SiC Epitaxial Layers and Substrates
Sako, Hideki, Kobayashi, Kenji, Ohira, Kentaro, Isshiki, ToshiyukiJournal:
Journal of Electronic Materials
DOI:
10.1007/s11664-020-08187-7
Date:
May, 2020
File:
PDF, 2.10 MB
2020