Effect of IGZO thin films fabricated by Pulsed-DC and RF...

Materials Science in Semiconductor Processing 2020 / 12 Vol. 120

Effect of IGZO thin films fabricated by Pulsed-DC and RF sputtering on TFT characteristics

Kim, Jaemin, Park, Jinsu, Yoon, Geonju, Khushabu, Agrawal, Kim, Jin-Seok, Pae, Sangwoo, Cho, Eun-Chel, Yi, Junsin
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Volume:
120
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2020.105264
Date:
December, 2020
File:
PDF, 5.10 MB
2020
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