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TEM Sample Preparation for the Semiconductor Industry using the Allied High Tech Multiprep⢠Polishing System in Conjunction with the Gat an Broad Beam Gun⢠and Graphite Holder and Accessories
Dobbs, Leah L., Ai, Rebecca X.Volume:
6
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927600034954
Date:
August, 2000
File:
PDF, 1.80 MB
2000