Influences of laser energy density and annealing on structure properties of AIN films prepared by pulsed laser deposition
Lei Lü, Qing-shan Li, Li Li, Li-chun Zhang, Cai-feng Wang, Hong-xia Qi, Mengmeng ZhengVolume:
3
Language:
english
Pages:
3
DOI:
10.1007/s11801-007-6187-z
Date:
July, 2007
File:
PDF, 962 KB
english, 2007