![](/img/cover-not-exists.png)
Optimal design of multi-nozzle etching process for shadow mask
Minkyo Seo, Jin Soo Park, Sangdae Park, Jae Hak JungVolume:
26
Language:
english
Pages:
9
DOI:
10.1007/s11814-009-0318-0
Date:
November, 2009
File:
PDF, 1.12 MB
english, 2009