Optimal design of multi-nozzle etching process for shadow...

Optimal design of multi-nozzle etching process for shadow mask

Minkyo Seo, Jin Soo Park, Sangdae Park, Jae Hak Jung
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Volume:
26
Language:
english
Pages:
9
DOI:
10.1007/s11814-009-0318-0
Date:
November, 2009
File:
PDF, 1.12 MB
english, 2009
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