The evolution of diffusion barriers in copper metallization

JOM Journal of the Minerals, Metals and Materials Society 2007 / 01 Vol. 59; Iss. 1

The evolution of diffusion barriers in copper metallization

Chiapyng Lee, Yu-Lin Kuo
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Volume:
59
Language:
english
Pages:
6
DOI:
10.1007/s11837-007-0009-4
Date:
January, 2007
File:
PDF, 1012 KB
english, 2007
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