Precise stepping control of a piezoelectric traveling wave micromotor through embedded in-situ detection
Wang, Yicheng, Yang, Tianyu, Li, Xiaoshi, Cheng, Jie, Chen, Yu, Gong, Dongdong, Sun, Xiangyu, Du, YijiaVolume:
30
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/ab9fcd
Date:
October, 2020
File:
PDF, 2.33 MB
2020