Crystalline Phase-Controlled High-Quality Hafnia Ferroelectric With RuOâ Electrode
Goh, Youngin, Cho, Sung Hyun, Park, Sang-Hee Ko, Jeon, SanghunYear:
2020
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2020.2998444
File:
PDF, 1.46 MB
2020