Two‐Step Plasma Treatment Designed for High‐Performance...

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Two‐Step Plasma Treatment Designed for High‐Performance Flexible Amorphous ZnAlSnO Thin‐Film Transistors Replacing Thermal Annealing

Lu, Rongkai, Lu, Jianguo, Wei, Xishuo, Yue, Shilu, Li, Siqin, Lu, Bojing, Zhao, Yi, Zhu, Liping, Chen, Lingxiang, Ye, Zhizhen
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Journal:
Advanced Electronic Materials
DOI:
10.1002/aelm.202000233
Date:
July, 2020
File:
PDF, 1.40 MB
2020
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