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Generation of Charged SiC Nanoparticles During HWCVD Process
Kim, Daseul, Kim, Du Yun, Kwon, Ji Hye, Kim, Kun-Su, Hwang, Nong-MoonJournal:
Electronic Materials Letters
DOI:
10.1007/s13391-020-00230-3
Date:
June, 2020
File:
PDF, 1.69 MB
2020