Athermal Polysilicon Mach-Zehnder Interferometer in Bulk CMOS
Hung, Yung-Jr, Tang, Cheng-Tse, Song, Zhan-Wen, Yen, Tzu-HsiangVolume:
32
Journal:
IEEE Photonics Technology Letters
DOI:
10.1109/LPT.2020.3000485
Date:
July, 2020
File:
PDF, 1.02 MB
2020