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[IEEE 2020 Moscow Workshop on Electronic and Networking Technologies (MWENT) - Moscow, Russia (2020.3.11-2020.3.13)] 2020 Moscow Workshop on Electronic and Networking Technologies (MWENT) - Thin Piezoelectric Films for Micromechanical Systems
Gurin, Sergey A., Pecherskaya, Ekaterina A., Spitsyna, Kseniya Yu., Fimin, Andrey V., Artamonov, Dmitriy V., Shepeleva, Anastasiya E.Year:
2020
DOI:
10.1109/mwent47943.2020.9067450
File:
PDF, 2.61 MB
2020