Thickness dependence of infrared lattice absorption and...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2020 / 07 Vol. 38; Iss. 4

Thickness dependence of infrared lattice absorption and excitonic absorption in ZnO layers on Si and SiO 2 grown by atomic layer deposition

Samarasingha, Nuwanjula S., Zollner, Stefan, Pal, Dipayan, Singh, Rinki, Chattopadhyay, Sudeshna
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Volume:
38
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/6.0000184
Date:
July, 2020
File:
PDF, 3.37 MB
2020
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