Cyclic etching of copper thin films using HBr and Ar gases

Cyclic etching of copper thin films using HBr and Ar gases

Lim, Eun Taek, Cha, Moon Hwan, Park, Sung Yong, Lee, Ji Su, Chung, Chee Won
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Volume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/6.0000218
Date:
July, 2020
File:
PDF, 1.41 MB
2020
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