Fabrication of a GaN template with an air tunnel in a...

Japanese Journal of Applied Physics 2020 / 01 Vol. 59; Iss. 1

Fabrication of a GaN template with an air tunnel in a patterned sapphire substrate using carbonization with a photoresist mask

Cho, Seunghee, Jeong, Woo Seop, Lee, Doo Won, Ahn, Min Joo, Shim, Kyu-Yeon, Byun, Dongjin
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Volume:
59
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/ab5bce
Date:
January, 2020
File:
PDF, 930 KB
2020
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