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DeepâUV lithography of nanocomposite thin films into magnetooptical gratings with submicron periodicity
Berling, Dominique, Bidaud, Clémentine, Gamet, Emilie, Jamon, Damien, Vidal, Loïc, Neveu, Sophie, Soppera, Olivier, Royer, FrançoisJournal:
ChemPhotoChem
DOI:
10.1002/cptc.202000048
Date:
July, 2020
File:
PDF, 1.34 MB
2020