A new improved vertical comb type differential capacitive...

A new improved vertical comb type differential capacitive sensing micro accelerometer using silicon-on-insulator wafer technology

Dounkal, Manoj Kumar, Bhan, R K, Kumar, Navin
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
30
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/ab9b13
Date:
October, 2020
File:
PDF, 4.57 MB
2020
Conversion to is in progress
Conversion to is failed