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A new improved vertical comb type differential capacitive sensing micro accelerometer using silicon-on-insulator wafer technology
Dounkal, Manoj Kumar, Bhan, R K, Kumar, NavinVolume:
30
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/ab9b13
Date:
October, 2020
File:
PDF, 4.57 MB
2020