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Analysis of the Thermoelastic Damping Effect in Electrostatically Actuated MEMS Resonators
Serdean, Florina, Pustan, Marius, Dudescu, Cristian, Birleanu, Corina, Serdean, MihaiVolume:
8
Journal:
Mathematics
DOI:
10.3390/math8071124
Date:
July, 2020
File:
PDF, 1.06 MB
2020