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High-aspect-ratio crack-free microstructures fabrication on sapphire by femtosecond laser ablation
Liu, Huagang, Li, Yang, Lin, Wenxiong, Hong, MinghuiVolume:
132
Journal:
Optics & Laser Technology
DOI:
10.1016/j.optlastec.2020.106472
Date:
December, 2020
File:
PDF, 1.21 MB
2020