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In-situ deflectometic measurement of transparent optics in precision robotic polishing
Ye, Junqiang, Niu, Zhenqi, Zhang, Xiangchao, Wang, Wei, Xu, MinVolume:
64
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2020.03.011
Date:
July, 2020
File:
PDF, 8.69 MB
2020