Novel self-modulated lateral superjunction device...

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Novel self-modulated lateral superjunction device suppressing the inherent 3-D JFET effect

Zhang, Wentong, He, Junqing, Cheng, Shikang, Zhang, Sen, He, Boyong, Qiao, Ming, Li, Zhaoji, Zhang, Bo
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Year:
2020
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2020.3009994
File:
PDF, 852 KB
2020
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