Development of diaphragm and microtunnel structures for...

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IEEE Transactions on Semiconductor Manufacturing 2020

Development of diaphragm and microtunnel structures for MEMS Piezoelectric Sensors

Kumar, Ashish, Prasad, Mahanth, Janyani, Vijay, Yadav, R.P
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Year:
2020
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2020.3009756
File:
PDF, 13.72 MB
2020
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