Three-Dimensional Observation of Internal Defects in a...

  • Main
  • 2020 / 7
  • Three-Dimensional Observation of Internal Defects in a...
Journal of Electronic Materials 2020 / 7

Three-Dimensional Observation of Internal Defects in a β-Ga2O3 (001) Wafer Using the FIB–SEM Serial Sectioning Method

Ogawa, Kenichi, Ogawa, Naoya, Kosaka, Ryo, Isshiki, Toshiyuki, Yao, Yongzhao, Ishikawa, Yukari
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-020-08313-5
Date:
July, 2020
File:
PDF, 2.23 MB
2020
Conversion to is in progress
Conversion to is failed