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Nano-scale depth-varying recrystallization of oblique Ar+ sputtered Si(111) layers
Gupta, Divya, Umapathy, G. R., Singhal, Rahul, Ojha, Sunil, Aggarwal, SanjeevVolume:
10
Journal:
Scientific Reports
DOI:
10.1038/s41598-020-68873-8
Date:
December, 2020
File:
PDF, 2.39 MB
2020