Modeling and fabrication of electrostatically actuated...

Modeling and fabrication of electrostatically actuated diaphragms for on-chip valving of MEMS-compatible microfluidic systems

Atik, Ali Can, Özkan, Metin Dündar, Özgür, Ebru, Külah, Haluk, Yıldırım, Ender
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Volume:
30
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aba16f
Date:
November, 2020
File:
PDF, 2.31 MB
2020
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