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Modeling and fabrication of electrostatically actuated diaphragms for on-chip valving of MEMS-compatible microfluidic systems
Atik, Ali Can, Ãzkan, Metin Dündar, Ãzgür, Ebru, Külah, Haluk, Yıldırım, EnderVolume:
30
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aba16f
Date:
November, 2020
File:
PDF, 2.31 MB
2020