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The Effect of Doping on the Structure of Zinc Oxide Obtained by Atomic Layer Deposition
Sugurbekova, Gulnar, Sugurbekov, Yerzhigit, Demeuova, Gulzat, Ualibek, Oral, Kurbanova, Aliya, Toktarbaiuly, Olzat, Mauit, OzhetVolume:
990
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.990.330
Date:
May, 2020
File:
PDF, 581 KB
2020