A High-resolution Area-change-based Capacitive MEMS Tilt...

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Sensors and Actuators A: Physical 2020 / 7

A High-resolution Area-change-based Capacitive MEMS Tilt Sensor

Rao, Kang, Liu, Huafeng, Wei, Xiaoli, Wu, Wenjie, Hu, Chenyuan, Fan, Ji, Liu, Jinquan, Tu, Liangcheng
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Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2020.112191
Date:
July, 2020
File:
PDF, 2.29 MB
2020
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