[IEEE 2020 IEEE Applied Power Electronics Conference and Exposition (APEC) - New Orleans, LA, USA (2020.3.15-2020.3.19)] 2020 IEEE Applied Power Electronics Conference and Exposition (APEC) - Feasibility on High Frequency Resonant Networks for Induction Heating Superheated Steam Generators for Wafer Cleaning Systems
Jang, Eunsu, Park, Sang Min, Kuk Lee, ByoungYear:
2020
DOI:
10.1109/APEC39645.2020.9124122
File:
PDF, 1.32 MB
2020