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[IEEE 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Lyon, France (2020.6.15-2020.6.26)] 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Fabrication of a Multiple Heater-Sensor Platform for Cell Temperature Monitoring
Garraud, Alexandra, Basrour, Skandar, Peyrade, DavidYear:
2020
DOI:
10.1109/DTIP51112.2020.9139132
File:
PDF, 1.17 MB
2020