Excellent Uniformity and Reliability Top‐Gate...

SID Symposium Digest of Technical Papers 2020 / 07 Vol. 51; Iss. S1

Excellent Uniformity and Reliability Top‐Gate Self‐Aligned IGZO TFTs with Cu Electrode

Ma, Qian, Zhou, Xing-Yu, Hsu, Yuan-Jun, Wu, Yuan-Chun, Zhang, Sheng-Dong
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Volume:
51
Journal:
SID Symposium Digest of Technical Papers
DOI:
10.1002/sdtp.13785
Date:
July, 2020
File:
PDF, 361 KB
2020
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