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Microelectronic Engineering 2020 / 7

Mechanisms of GaAs surface passivation by a one-step dry process using low-frequency plasma enhanced chemical deposition of silicon nitride

Richard, Olivier, Blais, Sonia, Arès, Richard, Aimez, Vincent, Jaouad, Abdelatif
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Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2020.111398
Date:
July, 2020
File:
PDF, 441 KB
2020
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