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[IEEE 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Lyon, France (2020.6.15-2020.6.26)] 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Growth of textured aluminum films on LiNbO 3 piezoelectric substrate with ultrathin tantalum underlayer.
Achahbar, Hala, Bernard, Florent, Courjon, Emilie, Baron, Thomas, Balandras, SylvainYear:
2020
DOI:
10.1109/DTIP51112.2020.9139158
File:
PDF, 1.12 MB
2020