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[IEEE 2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Qingdao (2018.10.31-2018.11.3)] 2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Numerical Simulations on Nanosecond Pulse Laser Annealing in Vertical Polycrystalline Si Macaroni Channel
Ma, Fushuai, Zhan, Xuepeng, Li, Yuan, Chen, JiezhiYear:
2018
DOI:
10.1109/icsict.2018.8565816
File:
PDF, 3.02 MB
2018