Fabrication and performance of p+ layer by SiO2 nanospheres assisted liquid boron diffusion
Zhu, Junkui, Shen, Honglie, Hu, Dongli, Gu, Hao, Gao, KaiJournal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-020-03989-1
Date:
July, 2020
File:
PDF, 1.15 MB
2020