Studying of nanocomposite filmsâ structure and properties obtained by magnetron sputtering
Tleukenov, Y O, Plotnikov, S V, Erdybaeva, N K, Pogrebnyak, A DVolume:
110
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899x/110/1/012004
Date:
February, 2016
File:
PDF, 1.11 MB
2016