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Localisation of silicon nanowires grown by UHV-CVD in (111)-oriented apertures opened in Si (001)
Boukhicha, R, Yam, V, Renard, C, Fossard, F, Bouchier, D, Agnus, G, Maroutian, T, Patriarche, GVolume:
6
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899x/6/1/012015
Date:
November, 2009
File:
PDF, 1.61 MB
2009