Active vibration isolation of nanotechnology equipment

IOP Conference Series Materials Science and Engineering 2020 / 01 Vol. 709

Active vibration isolation of nanotechnology equipment

Mikhailov, V P, Bazinenkov, A M, Kazakov, A V
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Volume:
709
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899x/709/4/044046
Date:
January, 2020
File:
PDF, 736 KB
2020
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