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Novel fabrication of fixed suspended silicon nitride structure for MEMS devices with dry etching
Subhani, Khawaja Nizammuddin, Khandare, Shubham, Biradar, R C, Bhat, K NVolume:
872
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899x/872/1/012157
Date:
June, 2020
File:
PDF, 1.17 MB
2020